关键词: 资源估计 OPC 非均匀网格图 可制造性

Abstract:

Based on the improved V-shape routing flow, a high-performance multilayer routing algorithm considering rnanufacturability is presented, and the routing is finished by coarsening followed by uncoarsening. In the coarsening step, a resource estimation is done and an initial global routing result is gen erated by a multicommodity flow algorithm at the coarsest level; in the uncoarsening step, the routing topology is refined by a graph-based Steiner tree   . The detailed routing employs a maze routing algorithm considering OPC, which employs an improved non-uniform graph for improving the rnanufacturabilit  y.

Key words: resource estimation, OPC, non-uniform graph, manufacturability